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Hybrid Air Bearing Stage, Single Plane XY

Hybrid Air Bearing Stage, Single Plane XY
Hybrid Air Bearing Stage, Single Plane XY
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  • Product Code: HybrYX
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The HybrYX® is a single plane XY hybrid air-bearing stage offers the advantages of a single plane air bearing stage at a much lower cost. HybrYX is well suited for semiconductor wafer inspection systems as well as being an excellent choice for use in large substrate (flat panel display and photovoltaic panel) inspection and processing tools.

feature
Pitch 15 µrad
Surface Flatness 0.6 µm
Travel Range 350 mm
Travel Range Y 650 mm

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