The HybrYX® is a single plane XY hybrid air-bearing stage offers the advantages of a single plane air bearing stage at a much lower cost. HybrYX is well suited for semiconductor wafer inspection systems as well as being an excellent choice for use in large substrate (flat panel display and photovolt..
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The HybrYXTM single plane XY hybrid air-bearing stage offers the advantages of a single plane air bearing stage at a much lower cost. The HybrYX G5 provides the advantages of a single plane architecture in a stage designed specifically for large payloads...
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The DynamYX RS Reticle Positioning Stage is designed for reticle inspection and repair applications. It features an extremely rigid ceramic reticle holder that is mounted to a single plane air bearing carriage. The cantilevered substrate is located away from all moving elements of the stage, which e..
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