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Air Bearing Stages for Inspection and Metrology

Air Bearing Stages for Semiconductor Inspection and Metrology

As semiconductor devices become smaller and more complex, high-precision positioning and motion control are critical for wafer inspection, metrology, and quality control. Air bearing stages provide an advanced solution for achieving ultra-smooth, frictionless motion, ensuring high-accuracy measurements and defect detection in semiconductor manufacturing.

Our state-of-the-art air bearing stages are designed to support high-speed, sub-nanometer precision positioning, making them ideal for semiconductor inspection, wafer metrology, and photolithography applications.

Why Choose Air Bearing Stages for Semiconductor Metrology?

  1. Frictionless Motion for Ultra-Smooth Performance
    Unlike traditional mechanical bearings, air bearing stages eliminate friction, resulting in zero wear, no backlash, and smoother motion. This ensures repeatable, high-precision measurements in metrology applications.

  2. Sub-Nanometer Positioning Accuracy
    Air bearing stages provide exceptional motion control, allowing for sub-micron to sub-nanometer positioning, essential for wafer alignment, defect detection, and high-resolution metrology.

  3. High-Speed and High-Throughput Testing
    Engineered for fast and stable motion, our air bearing stages enable rapid scanning and real-time inspection, improving manufacturing efficiency and yield rates.

  4. Elimination of Mechanical Wear for Long-Term Reliability
    Because there is no physical contact, air bearing systems provide longer operational life, reducing maintenance costs and downtime while ensuring consistent high-performance semiconductor testing.

  5. Ideal for Advanced Semiconductor Applications
    Whether used for wafer inspection, overlay metrology, or photomask alignment, our air bearing stages deliver precision motion control for the most demanding semiconductor processes.

Enhance Semiconductor Inspection with Air Bearing Stages!

For semiconductor manufacturers looking to improve metrology accuracy, increase throughput, and reduce operational wear, our air bearing stages provide the ultimate high-precision motion control solution.

Contact us today to explore our advanced air bearing stage solutions and optimize your semiconductor inspection and metrology processes!