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SinguLYS - Single Axis Air Bearing Stage

The Proprietary SiC ceramic beam used in the SinguLYS B-Series Bridge is 3 times lighter than steel and offers triple the stiffness of granite. These properties have allowed our customers to increase throughput in current and next-generation Flat Panel Display Inspection tools. The light and rigid p..
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Newport's SinguLYS S-Series stage features ceramic components similar to those found in the DynamYX and HybrYX families. The light-weight carriage with integrated pressure-vacuum elements is guided by a precisely lapped ceramic (L-shape) body. The rigidity and compact footprint of the SiC body allow..
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