Menu
Menu
Your Cart

Integrated Vertical and Stepper Motor Rotation Stage for Wafer Positioning

Integrated Vertical and Stepper Motor Rotation Stage for Wafer Positioning
Integrated Vertical and Stepper Motor Rotation Stage for Wafer Positioning
Integrated Vertical and Stepper Motor Rotation Stage for Wafer Positioning
Integrated Vertical and Stepper Motor Rotation Stage for Wafer Positioning
Integrated Vertical and Stepper Motor Rotation Stage for Wafer Positioning
Integrated Vertical and Stepper Motor Rotation Stage for Wafer Positioning
Integrated Vertical and Stepper Motor Rotation Stage for Wafer Positioning
  • Brand:
  • Product Code: ZVR-PP
$0.00
Ex Tax: $0.00

Available Options

Buy Now Request Quote
Add to Wish List Compare this Product

Newport’s new ZVR-PP is an integrated Z-vertical and Theta-rotation positioning stage designed to precisely elevate and rotate 200 mm and/or 300 mm diameter wafer chucks. The ZVR-PP offers precise 10 mm vertical and continuous 360 degree angular travel in a very low profile design. The low mass and high natural frequency of the ZVR-PP, provides a platform for rapid step-and-settle applications. With integrated vacuum and electrical lines accessed at a single point, and a three point mounting interface, the ZVR-PP offers convenient, stable, and high performance capability for applications such as wafer positioning. Please refer to the datasheet for full specifications on the ZVR-PP.Please refer to the datasheet for the complete specifications on the rotational and vertical motion capabilities of the ZVR-PP.

feature
Accuracy, Guaranteed Rotary: ±17 mdeg - Linear: ±2.0 µm
Accuracy, Typical Rotary: ±10 mdeg - Linear: ±0.5 µm
Angular Range 360°
Aperture Diameter 50 mm
Bi-directional Repeatability, Guaranteed ±6.0 mdeg
Bi-directional Repeatability, Linear ±1.2 (typical) ±2.0 (guaranteed) µm
Bi-directional Repeatability, Typical ±3.0 mdeg
Cable Length 3 m
Centered Load Capacity 100 N
Connector Type DB15 Male (2)
Eccentricity, Guaranteed ±4.0 µm
Eccentricity, Typical ±2.2 µm
Encoder Resolution Rotary:0.5mdeg
Limit Switches Optical ±165°
Maximum Linear Speed 10 mm/s
Maximum Speed 40°/s
Maximum Torque 1 N·m
Minimum Incremental Motion 2 mdeg
Minimum Incremental Motion, Linear 0.05 µm
MTBF 20,000 h (25% load, 10% duty cycle)
Origin Optical, centered
Origin Repeatability Rotary: ±20 mdegLinear :±2.5 µm
RoHS Compliant
Thread Type M4
Travel Range 10 mm
Uni-directional Repeatability, Guaranteed Rotary: ±1.5 mdeg - Linear: ± 1.0 µm
Uni-directional Repeatability, Typical Rotary: ±1.0 mdeg - Linear: ± 0.2 µm
Weight 4.2 kg
Wobble, Guaranteed ±40 µrad
Wobble, Typical ±22 µrad

Write a review

Tags: Integrated Vertical and Stepper Motor Rotation Stage for Wafer Positioning , ZVR-PP , ZVR Integrated Vertical and Rotation Stages