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Integrated Vertical and DC Rotation Stage for Wafer Positioning

Integrated Vertical and DC Rotation Stage for Wafer Positioning
Integrated Vertical and DC Rotation Stage for Wafer Positioning
Integrated Vertical and DC Rotation Stage for Wafer Positioning
Integrated Vertical and DC Rotation Stage for Wafer Positioning
Integrated Vertical and DC Rotation Stage for Wafer Positioning
Integrated Vertical and DC Rotation Stage for Wafer Positioning
Integrated Vertical and DC Rotation Stage for Wafer Positioning
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  • Product Code: ZVR-PC
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Newport’s new ZVR-PC is an integrated Z-vertical and DC Servo Theta-rotation positioning stage designed to precisely elevate and rotate 200 mm and/or 300 mm diameter wafer chucks. The ZVR-PC offers precise 10 mm vertical and continuous 360 degree angular travel in a very low profile design. Utilizing a DC Servo motor, and integrated rotary encoder in the theta stage, the ZVR-PC is capable of high speed, high performance positioning. With integrated vacuum and electrical lines accessed at a single point, and a three point mounting interface, the ZVR-PC offers convenient, stable, and high performance capability for applications such as wafer positioning. Please refer to the datasheet for the complete specifications on the rotational and vertical motion capabilities of the ZVR-PC.

feature
Accuracy, Guaranteed Rotary: ±15 mdeg - Linear: ±2.0 µm
Accuracy, Typical Rotary: ±10 mdeg - Linear: ±0.5 µm
Angular Range 360°
Aperture Diameter 50 mm
Bi-directional Repeatability, Guaranteed ±3.0 mdeg
Bi-directional Repeatability, Linear ±1.2 (typical) ±2.0 (guaranteed) µm
Bi-directional Repeatability, Typical ±1.3 mdeg
Cable Length 3 m
Centered Load Capacity 100 N
Connector Type DB15 M (2)
Eccentricity, Guaranteed ±4.0 µm
Eccentricity, Typical ±2.2 µm
Limit Switches Optical ±165°
Maximum Linear Speed 10 mm/s
Maximum Speed 80°/s
Maximum Torque 1 Nm
Minimum Incremental Motion 2 mdeg
Minimum Incremental Motion, Linear 0.05 µm
MTBF 20,000 h (25% load, 10% duty cycle)
Origin Optical, centered
Origin Repeatability Rotary: ±7.5 mdegLinear: ±2.5 µm
RoHS Compliant
Thread Type M4
Travel Range 10 mm
Uni-directional Repeatability, Guaranteed ±1.5 mdeg, ± 1.0 µm (linear)
Uni-directional Repeatability, Typical ±0.50 mdeg; ± 0.2 µm (linear)
Weight 4.2 kg
Wobble, Guaranteed ±40 µrad
Wobble, Typical ±22 µrad

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Tags: Integrated Vertical and DC Rotation Stage for Wafer Positioning , ZVR-PC , ZVR Integrated Vertical and Rotation Stages