Ultra-Precision Vertical Linear Motor Stage, 100 mm Travel, 100 N Load
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The XMS100V stage is comprised of a standard XMS100 stage mounted on a high flatness (surface flatness within 5 µm) vertical plate and a low friction air cylinder connected to the carriage. The custom-designed connection of the air cylinder to the carriage eliminates the effect of the air cylinder’s motion on the performance of the XMS100 stage. With the proper adjustment of pressure, a perfect balance of the load can be achieved. When motor power is turned off, the air cylinder’s valve will enable a controlled descent of the carriage. Also available with a more compact, but load-specific, magnetic counterweight.
feature | |
Accuracy, Guaranteed | ± 0.75 µm |
Bi-directional Repeatability, Guaranteed | ± 0.05 µm |
Cable Length | 5 m |
Centered Load Capacity | 100 N |
Compliance in Pitch | 2.5 µrad/Nm |
Compliance in Roll | 2.0 µrad/Nm |
Compliance in Yaw | 3.5 µrad/Nm |
Limit Switches | Optical, fiducial on encoder |
Maximum Speed | 300 mm/s |
Minimum Incremental Motion | 0.05 µm |
MTBF | 20,000 h |
Origin | Optical, at center of travel, including mechanical zero signal |
Straightness, Flatness | ± 0.75 µm |
Travel Range | 100 mm |
Weight | 3.5 kg |