Available Options
The GTS30V is a compact, vertical stage that combines outstanding trajectory accuracy with fine adjustment capability of 0.1 μm Minimum Incremental Motion with a travel range of 30 mm. Features include: a vertical guide system composed of matched pairs of anti-creep crossed roller bearings resulting in high-precision, ripple-free motion, a folded DC motor with a precision ground and a low-friction lead screw designed to deliver ultra-smooth motion. The GTS30V also does not back drive even with heavy loads, offering excellent in-position stability. A reduction belt between the motor and lead screw increases available output torque and robustness for servo loop sensitivity. The GTS30V is ideal for applications such as semiconductor wafer inspection, scanning, microscopy, laser machining, automated device alignment, metrology, quality control and applications requiring long travel vertical motion of 30 mm.
feature | |
Accuracy, Guaranteed | ±0.75 µm |
Accuracy, Typical | ±0.37 µm |
Bi-directional Repeatability, Guaranteed | ±0.10 µm |
Bi-directional Repeatability, Typical | ±0.07 µm |
Cable Length | 3 m |
Centered Load Capacity | 40 N |
Compliance in Pitch | 40 µrad/Nm |
Compliance in Roll | 40 µrad/Nm |
Compliance in Yaw | 25 µrad/Nm |
Connectors | DB25 Male |
Drive Screw Pitch | 1 mm |
Encoder Resolution | 0.050 µm |
Flatness Typical (Guaranteed) | ±0.75(na) µm |
Limit Switches | Optical |
Maximum Speed | 10 mm/s |
Minimum Incremental Motion | 0.10 µm |
MTBF | 20,000 h (25% load, 10% duty cycle) |
Origin | Optical, close to lower limit |
Origin Repeatability | ±0.05 µm |
Pitch, Guaranteed | ±25 µrad |
Pitch, Typical | ±20 µrad |
RoHS | Compliant |
Roll, Guaranteed | ±25 µrad |
Roll, Typical | ±12 µrad |
Straightness Typical (Guaranteed) | ±0.75(na) µm |
Thread Type | M4 and M6 |
Travel Range | 30 mm |
Weight | 3.3 kg |