Available Options
The VP-5ZA vertical stage is an ultra-low profile, precision vertical stage with minimum incremental motion capability of 60 nm, high-responsiveness and perfectly straight trajectory over 4.8 mm travel. Features include: an innovative inclined-plane design; a cool running, high torque DC motor with a precision preloaded, long-life, ball screw ensuring high speed motion with minimum settling time; a high-resolution linear scale directly attached to the moving rail, eliminating all drive-train induced motion errors; and two pairs of vertically mounted double-row linear ball bearing slides resulting in pure vertical motion. A standard 3-point mounting interface for a wafer chuck is provided as well. Manual vertical adjustments can be made using a flat screw driver for convenience. Typical applications include: semiconductor wafer inspection, photonics test and packaging, micro-assembly, precision metrology, and surface inspection systems. The VP-5ZA is compatible with the VP-25X linear stages and other Newport positioning products. For mounting to optical tables or to the ILS linear stages, use the optional base plate VP-BP.
feature | |
Accuracy, Guaranteed | ±1.5 µm |
Accuracy, Typical | ±0.6 µm |
Bi-directional Repeatability, Guaranteed | ±0.25 µm |
Bi-directional Repeatability, Typical | ±0.10 µm |
Cable Length | 1.5 m |
Centered Load Capacity | 50 N |
Compliance in Pitch | 45 µrad/Nm |
Compliance in Roll | 50 µrad/Nm |
Compliance in Yaw | 10 µrad/Nm |
Connectors | DB25 Male |
Drive Screw Pitch | 1 mm |
Encoder Resolution | 0.0196 µm |
Limit Switches | Optical |
Maximum Speed | 5 mm/s |
Minimum Incremental Motion | 0.060 µm |
MTBF | 20,000 h (25% load, 10% duty cycle) |
Origin | Optical, centered |
Origin Repeatability | ±0.1 µm |
Pitch, Guaranteed | ±50 µrad |
Pitch, Typical | ±30 µrad |
RoHS | Compliant |
Roll, Guaranteed | ±100 µrad |
Roll, Typical | ±30 µrad |
Thread Type | 4-40 and 8-32 |
Travel Range | 4.8 mm |
Uni-directional Repeatability, Guaranteed | ±0.15 µm |
Uni-directional Repeatability, Typical | ±0.06 µm |
Weight | 2.4 kg |
Yaw, Guaranteed | ±50 µrad |
Yaw, Typical | ±30 µrad |