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Ultra-Precision Linear Motor Stage, 210 mm Travel, 300 N Load, no cable, for XPS-D and XPS-RL

Ultra-Precision Linear Motor Stage, 210 mm Travel, 300 N Load, no cable, for XPS-D and XPS-RL
Ultra-Precision Linear Motor Stage, 210 mm Travel, 300 N Load, no cable, for XPS-D and XPS-RL
Ultra-Precision Linear Motor Stage, 210 mm Travel, 300 N Load, no cable, for XPS-D and XPS-RL
Ultra-Precision Linear Motor Stage, 210 mm Travel, 300 N Load, no cable, for XPS-D and XPS-RL
Ultra-Precision Linear Motor Stage, 210 mm Travel, 300 N Load, no cable, for XPS-D and XPS-RL
Ultra-Precision Linear Motor Stage, 210 mm Travel, 300 N Load, no cable, for XPS-D and XPS-RL
Ultra-Precision Linear Motor Stage, 210 mm Travel, 300 N Load, no cable, for XPS-D and XPS-RL
Ultra-Precision Linear Motor Stage, 210 mm Travel, 300 N Load, no cable, for XPS-D and XPS-RL
Ultra-Precision Linear Motor Stage, 210 mm Travel, 300 N Load, no cable, for XPS-D and XPS-RL
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  • Product Code: XML210-S
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The XML210-S Ultra-Performance Linear Stage delivers world-leading dynamic performance capable of consistent, reliable motion to 1 nm with a travel range of 210 mm. Innovative and compact; XM stages provide robust, repeatable motion with outstanding accuracy on the most complex trajectories. Featuring, precision engineered components and design that minimizes both wear and motor heating, XM performance maximizes your motion investment for the long-term. XM stages are an ultra-high-performance solution for applications such as laser machining, semiconductor wafer process, sensor test and calibration, ultra-precision assembly and other scanning applications requiring excellent dynamic response. The XML-S stage line is intended to be used with the XPS-D controller.

Associated driver module and cable kit is required and must be purchased separately

(see Accessories section below).

feature
Accuracy, Guaranteed ±1.5 µm
Accuracy, Typical ±0.5 µm
Bi-directional Repeatability, Guaranteed ±0.040 µm
Bi-directional Repeatability, Typical ±0.032 µm
Centered Load Capacity 300 N
Compatible XPS-D Driver Module XPS-DRV11
Compatible XPS-RL Driver Module XPS-DRV02
Compliance in Pitch 2.0 µrad/Nm
Compliance in Roll 0.5 µrad/Nm
Compliance in Yaw 1.0 µrad/Nm
Encoder Resolution 1 Vpp, 4 µm pitch
Flatness Typical (Guaranteed) ±0.75 (±1.50) µm
Flatness, Typical ±0.75 (±1.50) µm
Limit Switches Optical, on encoder's fiducial track
Maximum Continuous Force 50 N
Maximum Power Consumption 100 W
Maximum Speed 300 mm/s
Minimum Incremental Motion 0.001 µm
MTBF 20,000 h (25% load, 30% duty cycle)
Origin Optical, centered
Origin Repeatability ±0.025 µm
Peak Motor Force 240 N
Pitch, Guaranteed ±50 µrad
Pitch, Typical ±15 µrad
RoHS Compliant
Thread Type M4 and M6
Travel Range 210 mm
Weight 13 kg
Yaw, Guaranteed ±40 µrad
Yaw, Typical ±10 µrad

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Tags: Ultra-Precision Linear Motor Stage , 210 mm Travel , 300 N Load , no cable , for XPS-D and XPS-RL , XML210-S , XM Ultra-Precision Linear Motor Stages