Available Options
The XMS160-S Ultra-Performance Linear Stage delivers world-leading dynamic performance capable of consistent, reliable motion to 1 nm with a travel range of 160 mm. Innovative and compact; XM stages provide robust, repeatable motion with outstanding accuracy on the most complex trajectories. Featuring precision engineered components and design that minimizes both wear and motor heating, XM performance maximizes your motion investment for the long-term. XM-S stages are an ultra-high-performance solution for applications such as laser machining, semiconductor wafer process, sensor test and calibration, ultra-precision assembly and other scanning applications with high dynamic response. The XMS-S stage line is intended to be used with the XPS-D controller.
Associated driver module and cable kit is required and must be purchased separately for all –S stages ( see Accessories section below).
feature | |
Accuracy, Guaranteed | ±0.75 µm |
Accuracy, Typical | ±0.5 µm |
Bi-directional Repeatability, Guaranteed | ±0.040 µm |
Bi-directional Repeatability, Typical | ±0.030 µm |
Centered Load Capacity | 100 N |
Compatible XPS-D Driver Module | XPS-DRV11 |
Compatible XPS-RL Driver Module | XPS-DRV02 |
Compliance in Pitch | 2.0 µrad/Nm |
Compliance in Roll | 1.5 µrad/Nm |
Compliance in Yaw | 2.0 µrad/Nm |
Continuous Motor Force | 25 N |
Encoder Resolution | 1 Vpp 4 µm pitch |
Flatness Typical (Guaranteed) | ±0.37 (±0.75) µm |
Limit Switches | Optical, on encoder's fiducial track |
Maximum Power Consumption | 70 W |
Maximum Speed | 300 mm/s |
Minimum Incremental Motion | 0.001 µm |
MTBF | 20,000 h (25% load, 30% duty cycle) |
Origin | Optical, centered |
Origin Repeatability | ±0.025 µm |
Peak Motor Force | 100 N |
Pitch, Guaranteed | ±25 µrad |
Pitch, Typical | ±12 µrad |
RoHS | Compliant |
Straightness Typical (Guaranteed) | ±0.37 (±0.75) µm |
Thread Type | M4 and M6 |
Travel Range | 160 mm |
Weight | 4.5 kg |
Yaw, Guaranteed | ±25 µrad |
Yaw, Typical | ±10 µrad |