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Integrated XY Linear Stage, 90 mm Travel, Linear Motor, ONE-XY Series, High Accuracy version

Integrated XY Linear Stage, 90 mm Travel, Linear Motor, ONE-XY Series, High Accuracy version
Integrated XY Linear Stage, 90 mm Travel, Linear Motor, ONE-XY Series, High Accuracy version
Integrated XY Linear Stage, 90 mm Travel, Linear Motor, ONE-XY Series, High Accuracy version
Integrated XY Linear Stage, 90 mm Travel, Linear Motor, ONE-XY Series, High Accuracy version
Integrated XY Linear Stage, 90 mm Travel, Linear Motor, ONE-XY Series, High Accuracy version
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  • Product Code: ONE-XY100HA
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The ONE-XY100HA is a high accuracy version of an integrated XY linear motor stage designed to eliminate the integration of individual X and Y stages and increase system stiffness for dynamic applications. It features a travel range of 90 mm, with precise orthogonality alignment between the X and Y axes. This stage utilizes robust components such as its iron-less motor drive and cross-roller bearings to deliver high performance, making them ideal solutions for precision industrial applications such as semiconductor wafer inspection, microelectronics test and assembly, metrology, laser microprocessing.

feature
Accuracy, Guaranteed ±0.3 µm
Bi-directional Repeatability, Guaranteed ±0.080 µm
Bi-directional Repeatability, Typical ±0.040 µm
Cable Length 3 m
Centered Load Capacity 120 N
Compatible XPS-D Driver Module XPS-DRV02
Compatible XPS-RL Driver Module XPS-DRV02
Connector Type DB15 Male and DB9 Male
Continuous Motor Force 10 N
Encoder Resolution 1 Vpp 20 µm pitch
Flatness, Typical ±1.0 µm
Maximum Acceleration 0.3 G
Maximum Speed 200 mm/s
Minimum Incremental Motion 0.050 µm
Motorized Axes XY
MTBF 20,000 h (25% load, 30% duty cycle)
Origin Optical, centered
Origin Repeatability ±0.1 µm
Orthogonality 5 µrad
Peak Motor Force 21 N
Pitch, Guaranteed ±65 µrad
RoHS Compliant
Roll Typical (Guaranteed) ±29 (na) µrad
Straightness, Typical ±1.0 µm
Travel Range 90 mm
Weight 5.8 kg
Width 184 mm
Yaw, Guaranteed ±65 µrad

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Tags: Integrated XY Linear Stage , 90 mm Travel , Linear Motor , ONE-XY Series , High Accuracy version , ONE-XY100HA , One-XY , Mid-Travel Integrated XY Stages