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Integrated XY Linear Stage, 290 mm Travel, Linear Motor, ONE-XY Series

Integrated XY Linear Stage, 290 mm Travel, Linear Motor, ONE-XY Series
Integrated XY Linear Stage, 290 mm Travel, Linear Motor, ONE-XY Series
Integrated XY Linear Stage, 290 mm Travel, Linear Motor, ONE-XY Series
Integrated XY Linear Stage, 290 mm Travel, Linear Motor, ONE-XY Series
Integrated XY Linear Stage, 290 mm Travel, Linear Motor, ONE-XY Series
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  • Product Code: ONE-XY300
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The ONE-XY300 is an integrated XY linear motor stage designed to eliminate the integration of individual X and Y stages and increase system stiffness for dynamic applications. It features a travel range of 290 mm, with precise orthogonality alignment between the X and Y axes. This stage utilizes robust components such as its iron-less motor drive and cross-roller bearings to deliver high performance, making them ideal solutions for precision industrial applications such as semiconductor wafer inspection, microelectronics test and assembly, metrology, laser microprocessing.

feature
Accuracy, Guaranteed ±3.0 µm
Bi-directional Repeatability, Guaranteed ±0.100 µm
Cable Length 3 m
Centered Load Capacity 350 N
Compatible XPS-D Driver Module XPS-DRV02
Compatible XPS-RL Driver Module XPS-DRV02
Connector Type DB15 Male and DB9 Male
Continuous Motor Force 53 N
Encoder Resolution 1 Vpp 20 µm pitch
Flatness, Typical ±3.0 µm
Limit Switches Integrated home and end of travel limits
Maximum Acceleration 0.2 G
Maximum Speed 200 mm/s
Minimum Incremental Motion 0.050 µm
Motorized Axes XY
MTBF 20,000 h (25% load, 30% duty cycle)
Origin Optical, centered
Origin Repeatability ±0.1 µm
Orthogonality 96 µrad
Peak Motor Force 107 N
Pitch, Typical ±90 µrad
RoHS Compliant
Roll, Typical ±24 µrad
Straightness, Typical ±3.0 µm
Travel Range 290 mm
Weight 75 kg
Width 500 mm
Yaw, Guaranteed ±90 µrad

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Tags: Integrated XY Linear Stage , 290 mm Travel , Linear Motor , ONE-XY Series , ONE-XY300 , One-XY , Mid-Travel Integrated XY Stages