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High Performance Linear Stage, 300 mm Travel, Linear Motor, 1/4-20, no cable for XPS-D and XPS-RL

High Performance Linear Stage, 300 mm Travel, Linear Motor, 1/4-20, no cable for XPS-D and XPS-RL
High Performance Linear Stage, 300 mm Travel, Linear Motor, 1/4-20, no cable for XPS-D and XPS-RL
High Performance Linear Stage, 300 mm Travel, Linear Motor, 1/4-20, no cable for XPS-D and XPS-RL
High Performance Linear Stage, 300 mm Travel, Linear Motor, 1/4-20, no cable for XPS-D and XPS-RL
High Performance Linear Stage, 300 mm Travel, Linear Motor, 1/4-20, no cable for XPS-D and XPS-RL
High Performance Linear Stage, 300 mm Travel, Linear Motor, 1/4-20, no cable for XPS-D and XPS-RL
High Performance Linear Stage, 300 mm Travel, Linear Motor, 1/4-20, no cable for XPS-D and XPS-RL
  • Brand:
  • Product Code: ILS300LM-S
$6,035.00
Ex Tax: $6,035.00

Available Options

The ILS300LM-S Linear Motor Stage feature a robust design with 300 mm of high performance travel and low cost design, making it a cost-effective solutions for precision industrial applications such as semiconductor wafer inspection, micro-electronics test and assembly, pick and place, DNA sequencing, or laser machining. It utilizes an FEM-optimized extruded aluminum body that is extremely stiff and minimizes the bending effect caused by the different thermal expansion coefficients of the aluminum body and the steel rails. The rigidity of the body minimizes the deflection under load. The ILS-LM employs a centered, high efficiency 3-phase, synchronous ironless, linear motor that is absolutely noise-free and has the advantage of higher speed, high acceleration and high system responsiveness without wear associated with motor brushes or drive screws. Recirculating ball bearing slides provide excellent payload capabilities and long life. The movement is smooth with low noise. Precision position feedback is supplied by a very repeatable linear scale mounted in the stage. The encoder signals for the ILS300LM-S are intended to be interpolated by Newport’s XPS-D motion controller with nanometer resolution for outstanding position sensitivity, repeatability, and stability.

Associated driver module and cable kit is required and must be purchased separately

(see Accessories section below).

feature
Accuracy, Guaranteed ±2.5 µm
Accuracy, Typical ±1.2 µm
Bi-directional Repeatability, Guaranteed ±0.30 µm
Bi-directional Repeatability, Typical ±0.12 µm
Centered Load Capacity 250 N
Compatible XPS-D Driver Module XPS-DRV02
Compatible XPS-RL Driver Module XPS-DRV02
Compliance in Pitch 10 µrad/Nm
Compliance in Roll 15 µrad/Nm
Compliance in Yaw 10 µrad/Nm
Continuous Motor Force 20 N
Encoder Resolution 1 Vpp 20 µm pitch
Maximum Power Consumption 80 W
Maximum Speed 500 mm/s
Minimum Incremental Motion 0.010 µm
MTBF 20,000 h (25% load, 30% duty cycle)
Origin Optical, centered
Origin Repeatability ±0.1 µm
Peak Motor Force 72 N
Pitch, Guaranteed ±150 µrad
Pitch, Typical ±40 µrad
RoHS Compliant
Thread Type 1/4-20
Travel Range 300 mm
Weight 4.5 kg
Yaw, Guaranteed ±150 µrad
Yaw, Typical ±25 µrad

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