High Performance Linear Stage, 100 mm Travel, Linear Motor, 1/4-20, no cable, for XPS-D and XPS-RL

The ILS100LM-S Linear Motor Stage feature a robust design with 100 mm of high performance travel and low cost design, making it a cost-effective solutions for precision industrial applications such as semiconductor wafer inspection, micro-electronics test and assembly, pick and place, DNA sequencing, or laser machining. It utilizes an FEM-optimized extruded aluminum body that is extremely stiff and minimizes the bending effect caused by the different thermal expansion coefficients of the aluminum body and the steel rails. The rigidity of the body minimizes the deflection under load. The ILS-LM employs a centered, high efficiency 3-phase, synchronous ironless, linear motor that is absolutely noise-free and has the advantage of higher speed, high acceleration and high system responsiveness without wear associated with motor brushes or drive screws. Recirculating ball bearing slides provide excellent payload capabilities and long life. The movement is smooth with low noise. Precision position feedback is supplied by a very repeatable linear scale mounted in the stage. The encoder signals for the ILS100LM-S are intended to be interpolated by Newport’s XPS-D motion controller with nanometer resolution for outstanding position sensitivity, repeatability, and stability.

Associated driver module and cable kit is required and must be purchased separately

(see Accessories secton below).