Metrology Linear Stage, High Accuracy, 100 mm Travel, Stepper Motor
$5,509.00
Ex Tax: $5,509.00
Available Options
The FMS100PPHA precision linear stage is capable of 100mm of travel and comes equipped with a stepper motor and a linear encoder. Featuring monolithic steel construction, patent-pending preload technology, and innovative anti-creep cross-roller bearings, this stage is capable of smooth motion with exceptional flatness and straightness. Steel construction and thermally-matched design insure optimal repeatability and stability. Typical applications include: contact and non-contact profilometry, mechanical and tribological testing, microstructure characterization and laser micromachining.
feature | |
Accuracy, Guaranteed | ±0.5 µm |
Accuracy, Typical | ±0.2 µm |
Axial Load Capacity (+Cx) | 30 N |
Bi-directional Repeatability, Guaranteed | ±0.25 µm |
Bi-directional Repeatability, Typical | ±0.15 µm |
Cable Length | 3 m |
Centered Load Capacity | 150 N |
Compatible XPS-D Driver Module | XPS-DRV11 |
Compatible XPS-RL Driver Module | XPS-DRV01 |
Compliance in Pitch | 2 µrad/Nm |
Compliance in Roll | 3 µrad/Nm |
Compliance in Yaw | 2 µrad/Nm |
Connector Type | DB25 Male |
Drive Screw Pitch | 2 mm |
Encoder Resolution | 0.05 µm |
Flatness Typical (Guaranteed) | ±0.25 (±0.75) µm |
Inverse Axial Load Capacity (-Cx) | -30 N |
Limit Switches | Optical |
Maximum Power Consumption | 30 W |
Maximum Speed | 50 mm/s |
Minimum Incremental Motion | 0.10 µm |
MTBF | 20,000 h (25% load, 30% duty cycle) |
Origin | Optical, close to lower limit |
Origin Repeatability | ±0.05 µm |
Pitch, Guaranteed | ±40 µrad |
Pitch, Typical | ±15 µrad |
RoHS | Compliant |
Straightness Typical (Guaranteed) | ±0.25 (±0.75) µm |
Thread Type | M6 |
Travel Range | 100 mm |
Uni-directional Repeatability, Guaranteed | ±0.10 µm |
Uni-directional Repeatability, Typical | ±0.06 µm |
Weight | 6.5 kg |
Yaw, Guaranteed | ±10 µrad |
Yaw, Typical | ±4.0 µrad |