Available Options
The M-IMS1200LM-S Linear Stage is designed for self-supporting applications with a 1200 mm travel range. The stage features a robust design and high performance at low cost, making it a cost-effective solution for precision industrial and laboratory applications. The IMS utilizes an FEM-optimized extruded aluminum body to avoid bending effects or deflection under load. The linear motor employs a centered, high efficiency 3-phase synchronous iron core, linear motor as driving element, providing high speed, high acceleration and high system responsiveness. The IMS series stages are ideal for many precision industrial applications such as semiconductor wafer inspection, micro-electronics test and assembly, DNA sequencing or laser machining.
Associated driver module and cable kit is required and must be purchased separately
(see Accessories secton below).
feature | |
Accuracy, Guaranteed | ±9.0 µm |
Accuracy, Typical | ±5.0 µm |
Bi-directional Repeatability, Guaranteed | ±0.50 µm |
Bi-directional Repeatability, Typical | ±0.13 µm |
Centered Load Capacity | 600 N |
Compliance in Pitch | 0.2 µrad/N·m |
Compliance in Roll | 1 µrad/N·m |
Compliance in Yaw | 1 µrad/N·m |
Continuous Motor Force | 100 N |
Encoder Resolution | 1 Vpp 20 µm pitch |
Limit Switches | Optical |
Maximum Speed | 1000 mm/s |
Minimum Incremental Motion | 0.020 µm |
MTBF | 20,000 h (25% load, 30% duty cycle) |
Origin | Optical, centered |
Origin Repeatability | ±0.05 µm |
Peak Motor Force | 210 N |
Pitch, Guaranteed | ±250 µrad |
Pitch, Typical | ±125 µrad |
RoHS | Compliant |
Thread Type | M6 |
Travel Range | 1200 mm |
Weight | 32 kg |
Yaw, Guaranteed | ±150 µrad |
Yaw, Typical | ±40 µrad |