Available Options
The M-IMS300LM-S Linear Stage is designed for self-supporting applications with a 300 mm travel range. The extreme stiffness of the FEM-optimized aluminum body allows mounting on 4-pts, without degrading its performance making it ideal for delay lines and other applications on non-flat mounting surfaces. The linear motor employs a centered, high efficiency 3-phase synchronous iron core, linear motor as driving element, providing high speed, high acceleration and high system responsiveness. The IMS series stages are ideal for many precision industrial applications such as semiconductor wafer inspection, micro-electronics test and assembly, DNA sequencing or laser machining.
Associated driver module and cable kit is required and must be purchased separately
(see Accessories section below).
feature | |
Accuracy, Guaranteed | ±4.5 µm |
Accuracy, Typical | ±1.7 µm |
Bi-directional Repeatability, Guaranteed | ±0.25 µm |
Bi-directional Repeatability, Typical | ±0.08 µm |
Centered Load Capacity | 600 N |
Compliance in Pitch | 0.2 µrad/N·m |
Compliance in Roll | 1 µrad/N·m |
Compliance in Yaw | 1 µrad/N·m |
Continuous Motor Force | 100 N |
Encoder Resolution | 1 Vpp 20 µm pitch |
Limit Switches | Optical |
Maximum Speed | 1000 mm/s |
Minimum Incremental Motion | 0.020 µm |
MTBF | 20,000 h (25% load, 30% duty cycle) |
Origin | Optical, centered |
Origin Repeatability | ±0.05 µm |
Peak Motor Force | 210 N |
Pitch, Guaranteed | ±75 µrad |
Pitch, Typical | ±37 µrad |
RoHS | Compliant |
Thread Type | M6 |
Travel Range | 300 mm |
Weight | 17 kg |
Yaw, Guaranteed | ±50 µrad |
Yaw, Typical | ±25 µrad |