Motorized XYZθxθyθz Aligner, 3 mm, 4°, 1/4-20
$3,376.00
Ex Tax: $3,376.00
Available Options
The 8095 XYZθxθyθz Motorized Six-Axis Aligner increases the utility of our popular kinematic stages by motorizing each of the axes. The addition of Picomotor™ actuators to each stage allows remote high-resolution (<30 nm) adjustment of various combinations of X, Y, Z, θx, θy, and θz. The Model 8095 six-axis aligner is ideal for semiconductor-wafer alignment. 1/4-20 tapped holes.
feature | |
Angular Range | 4° |
Angular Resolution | θx, θy, θz≤0.2 µrad |
Axes of Travel | X, Y, Z, θx, θy, θz |
Connector Type | 4-pin Connectors (6) |
Load Capacity | 13 N |
Mechanism | Piezo Motor |
Minimum Incremental Motion | <30 nm |
Operating Temperature | 10 to 40°C |
Thread Type | 1/4-20 |
Travel Range | 3 mm |
Tags:
Motorized XYZθxθyθz Aligner
, 3 mm
, 4°
, 1/4-20
, 8095
, Multi-Axis Piezo Device Alignment Stages