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Motorized XYZθxθyθz Aligner, 3 mm, 4°, 1/4-20

Motorized XYZθxθyθz Aligner, 3 mm, 4°, 1/4-20
Motorized XYZθxθyθz Aligner, 3 mm, 4°, 1/4-20
  • Brand:
  • Product Code: 8095
$3,376.00
Ex Tax: $3,376.00

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The 8095 XYZθxθyθz Motorized Six-Axis Aligner increases the utility of our popular kinematic stages by motorizing each of the axes. The addition of Picomotor™ actuators to each stage allows remote high-resolution (<30 nm) adjustment of various combinations of X, Y, Z, θx, θy, and θz. The Model 8095 six-axis aligner is ideal for semiconductor-wafer alignment. 1/4-20 tapped holes.

feature
Angular Range
Angular Resolution θx, θy, θz≤0.2 µrad
Axes of Travel X, Y, Z, θx, θy, θz
Connector Type 4-pin Connectors (6)
Load Capacity 13 N
Mechanism Piezo Motor
Minimum Incremental Motion <30 nm
Operating Temperature 10 to 40°C
Thread Type 1/4-20
Travel Range 3 mm

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