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Motorized Wide XYZθxθyθz Aligner, 3 mm, 4°, M6

Motorized Wide XYZθxθyθz Aligner, 3 mm, 4°, M6
Motorized Wide XYZθxθyθz Aligner, 3 mm, 4°, M6
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  • Product Code: 8095-M
$3,376.00
Ex Tax: $3,376.00

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The 8095-M XYZθxθyθz Motorized Six-Axis Aligner increases the utility of our popular kinematic stages by motorizing each of the axes. The addition of Picomotor™ actuators to each stage allows remote high-resolution (<30 nm) adjustment of various combinations of X, Y, Z, θx, θy, and θz. The Model 8095-M six-axis aligner is ideal for semiconductor-wafer alignment. M6 tapped holes.

feature
Angular Range 4°
Angular Resolution θx, θy, θz≤0.2 µrad
Axes of Travel X, Y, Z, θx, θy, θz
Connector Type 4-pin Connectors (6)
Load Capacity 13 N
Mechanism Piezo Motor
Minimum Incremental Motion <30 nm
Operating Temperature 10 to 40°C
Thread Type M6
Travel Range 3 mm

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Tags: Motorized Wide XYZθxθyθz Aligner , 3 mm , 4° , M6 , 8095-M , Multi-Axis Piezo Device Alignment Stages