Flood Exposure Source, 1000 W Hg(Xe), 6 x 6 in., ± 2.5°, 350 - 450 nm

The 92530 Flood Exposure Source is a 1000 Watt source for the near UV (350 - 450 nm) spectral range. NUV sources run an Hg(Xe) lamp, use a N-BK7 glass lens (which does not transmit below 350 nm), and have the appropriate dichroic mirrors. NUV is designed to expose most photoresists. This illuminator irradiates samples with a 6.0 inch x 6.0 inch (152 mm x 152 mm) collimated beam with a ± 2.5° collimation angle. Typical output is 43 mW cm-2. An efficient ellipsoidal reflector, coated with AlSiO for the NUV collects up to 70% of the arc lamp output. A 45° primary dichroic mirror spectrally reflects the light after passing through a proprietary design beam homogenizer. The homogenizer, or optical integrator, is similar to a compound fly's eye. It scrambles the arc lamp's non-uniform irradiance to produce many diverging beams. These diverging beams overlap at the collimating lens to produce a highly uniform, collimated beam at the work plane.