Integrated XY Linear Stage, 90 mm Travel, Linear Motor, ONE-XY Series, High Accuracy version
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The ONE-XY100HA is a high accuracy version of an integrated XY linear motor stage designed to eliminate the integration of individual X and Y stages and increase system stiffness for dynamic applications. It features a travel range of 90 mm, with precise orthogonality alignment between the X and Y axes. This stage utilizes robust components such as its iron-less motor drive and cross-roller bearings to deliver high performance, making them ideal solutions for precision industrial applications such as semiconductor wafer inspection, microelectronics test and assembly, metrology, laser microprocessing.
feature | |
Accuracy, Guaranteed | ±0.3 µm |
Bi-directional Repeatability, Guaranteed | ±0.080 µm |
Bi-directional Repeatability, Typical | ±0.040 µm |
Cable Length | 3 m |
Centered Load Capacity | 120 N |
Compatible XPS-D Driver Module | XPS-DRV02 |
Compatible XPS-RL Driver Module | XPS-DRV02 |
Connector Type | DB15 Male and DB9 Male |
Continuous Motor Force | 10 N |
Encoder Resolution | 1 Vpp 20 µm pitch |
Flatness, Typical | ±1.0 µm |
Maximum Acceleration | 0.3 G |
Maximum Speed | 200 mm/s |
Minimum Incremental Motion | 0.050 µm |
Motorized Axes | XY |
MTBF | 20,000 h (25% load, 30% duty cycle) |
Origin | Optical, centered |
Origin Repeatability | ±0.1 µm |
Orthogonality | 5 µrad |
Peak Motor Force | 21 N |
Pitch, Guaranteed | ±65 µrad |
RoHS | Compliant |
Roll Typical (Guaranteed) | ±29 (na) µrad |
Straightness, Typical | ±1.0 µm |
Travel Range | 90 mm |
Weight | 5.8 kg |
Width | 184 mm |
Yaw, Guaranteed | ±65 µrad |