High-Throughput Air Bearing Stage, DynamYX GT

The DynamYX^® GT air-bearing stage is intended for high-throughput applications with aggressive duty-cycles. Featuring an extremely rigid structure and high load capacity air bearings, it provides up to 2G acceleration. The DynamYX GT also has high-efficiency X and Y linear motors with integrated cooling drive moving masses through the respective CG's. It is also available with Newport’s patented ZT3, Z-Tip-Tilt-Theta stage