Wafer Positioning Air Bearing Stage, DynamYX 300
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The DynamYX® 300 Wafer Positioning Stage features a simple, 3-piece architecture in a two motor design that provides a cost effective solution for high accuracy and dynamic performance for step-and-settle and/or scanning applications. It has the smallest footprint in Newport’s line of air bearing wafer positioning stages and is designed for 300 mm wafer test, measurement, and processing applications.
feature | |
Bearings | Vacuum/pressure air bearing |
Drive Type | Ironless linear motor |
Maximum Speed | 400 mm/s |
Resolution | 2 nm |
Travel, X | 96 mm |
Travel, Y | 340 mm |
Weight | 550 kg |