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Laser Micromachining Workstation, µFAB-L

Laser Micromachining Workstation, µFAB-L
Laser Micromachining Workstation, µFAB-L
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  • Product Code: UFAB-L
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The µFAB-L laser Micromachining Workstation is a table-top easy to use micromachining tool for various applied materials research fields. This device employs high performance galvanometer scanners for fast laser writing and a XYZ stage assembly for sample positioning. The included software allows importing several types of CAD files and permits large areas microfabrication by stitching galvos and stages motion.

feature
Angular Resolution 2.8 µrad for angle range of +/- 0.36 rad
Attenuation Range OD0 to OD4 (Computer Controlled)
Beam Diameter (1/e2) 5 mm
Dimensions 762 x 762 x 762 mm
Galvanometric Mirror Marking Speed 2 m/s
Galvanometric Mirror Repeatability < 2 µrad
Maximum Speed X, Y, Z 50 mm/s, 50 mm/s, 1 mm/s
Minimum Incremental Motion X, Y, Z 0.10 µm, 0.10 µm, 0.05 µm
Travel Range X, Y, Z 150 mm, 150 mm, 13 mm
Wavelength Range 350 to 1100 nm
Weight 86 kg

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Tags: Laser Micromachining Workstation , µFAB-L , UFAB-L , uFAB-L Micromachining Workstation