SinguLYS B-1200 Air Bearing Stage
$0.00
Ex Tax: $0.00
Available Options
The Proprietary SiC ceramic beam used in the SinguLYS B-Series Bridge is 3 times lighter than steel and offers triple the stiffness of granite. These properties have allowed our customers to increase throughput in current and next-generation Flat Panel Display Inspection tools. The light and rigid pressure-vacuum air bearing carriage accomodates high (10 kg) cantilevered payloads and significantly reduces contamination to the payload below. Besides cleanliness, the frictionless design eliminates the need for mechanical bearing maintenance/lubrication.
feature | |
Bearings | Vacuum/pressure air bearing |
Drive Type | Ironcore linear motor |
Maximum Acceleration | 2 G |
Maximum Speed | 2.5 m/s |
On-Axis Accuracy | ± 0.5 µm |
Pitch | 20 µrad |
Roll | 20 µrad |
Travel Range | 1200 mm |
Yaw | 20 µrad |