SinguLYS S-370 Air Bearing Stage
$0.00
Ex Tax: $0.00
Available Options
Newport's SinguLYS S-Series stage features ceramic components similar to those found in the DynamYX and HybrYX families. The light-weight carriage with integrated pressure-vacuum elements is guided by a precisely lapped ceramic (L-shape) body. The rigidity and compact footprint of the SiC body allows this high-precision stage to be used in tight spaces typically reserved for mechanical bearing designs. The S-370 is perfect for applications with very high duty-cycles and require low pitch/yaw, tight velocity regulation and high cleanliness.
feature | |
Bearings | Vacuum/pressure air bearing |
Maximum Acceleration | 0.5 G |
Maximum Speed | 500 mm/s |
Minimum Incremental Motion | 10 nm |
On-Axis Accuracy | ± 0.1 µm |
Pitch | 10 µrad |
Roll | 10 µrad |
Travel Range | 370 mm |
Yaw | 10 µrad |