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SinguLYS S-370 Air Bearing Stage

SinguLYS S-370 Air Bearing Stage
SinguLYS S-370 Air Bearing Stage
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  • Product Code: SinguLYS-S-370
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Newport's SinguLYS S-Series stage features ceramic components similar to those found in the DynamYX and HybrYX families. The light-weight carriage with integrated pressure-vacuum elements is guided by a precisely lapped ceramic (L-shape) body. The rigidity and compact footprint of the SiC body allows this high-precision stage to be used in tight spaces typically reserved for mechanical bearing designs. The S-370 is perfect for applications with very high duty-cycles and require low pitch/yaw, tight velocity regulation and high cleanliness.

feature
Bearings Vacuum/pressure air bearing
Maximum Acceleration 0.5 G
Maximum Speed 500 mm/s
Minimum Incremental Motion 10 nm
On-Axis Accuracy ± 0.1 µm
Pitch 10 µrad
Roll 10 µrad
Travel Range 370 mm
Yaw 10 µrad

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