SinguLYS B-1200 Air Bearing Stage

The Proprietary SiC ceramic beam used in the SinguLYS B-Series Bridge is 3 times lighter than steel and offers triple the stiffness of granite. These properties have allowed our customers to increase throughput in current and next-generation Flat Panel Display Inspection tools. The light and rigid pressure-vacuum air bearing carriage accomodates high (10 kg) cantilevered payloads and significantly reduces contamination to the payload below. Besides cleanliness, the frictionless design eliminates the need for mechanical bearing maintenance/lubrication.